Gas
HCL
Grade 5N5
Packages Tube Trailer, 660kg Tonner, Y Cylinder, 43L, 25kg Cylinder, 50kg Cylinder
Capacity NA
Suppliers Burghausen (DE), Ruiheng, Yuayu Tongfang
WF6
Grade 5N
Packages 44 L, 59 kg (125 lbs) cylinder
Capacity 2,300 T/Y
Suppliers Peric (Handan, China) World’s Largest Producer
SDS: AsH3, PH3, 11BF3
Grade NA
Packages AsH3, PH3, BF3 & GeF4
Capacity NA
Suppliers Gentech, Nata, 11BF3 (3M, Nuken)
NF3
Grade 4N6
Packages Tube Trailer, 660kg Tonner, Y Cylinder, 43L, 25kg Cylinder, 50kg Cylinder
Capacity 12,500 T/Y
Suppliers Peric & Nata World’s Largest Producer
C2F6
Grade 5N
Packages 47 L, 43 kg cylinder
Capacity NA
Suppliers Daikin (Japan)
Other Available Gases
Cl2, HBr, B2H6, AsH3, PH3, C4F6, C4F8, CF4, CHF3, CH2F2, GeH4, GeCl4, GeF4, N2O, NO, CO, CO2, He, Ne , Kr, Xe, Laser Gas Mixture, SDS package: 11BF3, AsH3, PH3, GeF4, SiH4, Si2H6, SiF4, MCS, DCS, TCS, STC, HCDS, 4MS, D4, MO & Silicon Precursors: TEOS, TEB, TMB, TMPO,TDMAT, BTBAS, POCL3, Bulk gas full turnkey projects, Electronic grade Poly Silicon
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