Spare Parts
Repair Solutions
SiC recycle rings
ESC/heaters/pedestals
TEL Vigus heat focus rings
RF/RPS/match/microwave
Laser
PCB, controller, servo motor
MFC
Robots
Valves
Pumps, including Ebara pumps
TC for diffusion furnace / general TC
Wafer reclaim services
Supply New Solutions
ESC/heaters/pedestals
Faceplate/showerhead
Alternate parts – quartz, ceramic, SiC
Si parts
Lamps for RTP process
RTP housing
Jacket heater
Gaskets
TC for diffusion furnace
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